The performance of an optical system with sensitive line-of-sight (LOS) is influenced by rotational vibration. In view of this, a design methodology is proposed for a passive vibration isolation system in an optical system with sensitive LOS. Rotational vibration is attributed to two sources: transmitted from the mounting base and generated by modal coupling. Therefore, the elimination of the rotational vibration caused by coupling becomes an important part of the design of the isolation system. Additionally, the decoupling conditions of the system can be obtained. When the system is totally decoupled, the vibration on each degree of freedom (DOF) can be analyzed independently. Therefore, the stiffness and damping coefficient on each DOF could be obtained by limiting the vibration transmissibility, in accordance to actual requirements. The design of a vibration isolation system must be restricted by the size and shape of the payload and the installation space, and the layout constrains are thus also discussed.

The detection mission of gravitational waves in space is that the accuracy of the long-baseline intersatellite laser interferometry on the million-kilometer order needs to reach the order of 8 pm/ Hz . Among all noise sources that affect the interferometry accuracy, tilt-to-length (TTL) coupling noise is the second largest source of noise after shot noise. This paper focuses on studying the contribution of TTL coupling noise of the telescope system in the intersatellite scientific interferometer. By referring to the laser interferometer space antenna (LISA)’s noise budget, TTL coupling noise is required to be within ±25 μm/rad (±300 μrad). Therefore, this paper focuses on studying both the mechanism of TTL coupling noise due to the noise sources of the telescope and the method of suppressing the TTL noise, which can lay a foundation for noise distribution and the development of engineering prototypes in subsequent tasks.

In this paper, a calibration method is proposed which eliminates the zeroth order effect in lateral shearing interferometry. An analytical expression of the calibration error function is deduced, and the relationship between the phase-restoration error and calibration error is established. The analytical results show that the phase-restoration error introduced by the calibration error is proportional to the phase shifting error and zeroth order effect. The calibration method is verified using simulations and experiments. The simulation results show that the phase-restoration error is approximately proportional to the phase shift error and zeroth order effect, when the phase shifting error is less than 2° and the zeroth order effect is less than 0.2. The experimental result shows that compared with the conventional method with 9-frame interferograms, the calibration method with 5-frame interferograms achieves nearly the same restoration accuracy.

为降低传统光栅横向剪切干涉仪中双方孔空间滤波器带来的加工和装调难度, 设计了一种基于9步式零级相位误差标定的光栅横向剪切干涉测量方法, 只需采用可变空间滤波器即可抑制零级串扰对相移相位复原的影响。针对数值孔径为0.125的投影光刻物镜, 完成了参数设计和原理验证系统的搭建。通过剪切相位复原和波前重构, 实现了该物镜的波像差检测。结果表明：其波像差小于20.32 nm。最后对该光栅横向剪切干涉仪进行重复精度实验, 其重复精度的方均根值为0.1303 nm, 系统性能良好。